Optical properties of Diamond like Carbon films prepared by DC-PECVD
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چکیده
منابع مشابه
Properties of N-doped Diamond-like Carbon Films Prepared by the PLD Method
N-doped diamond-like carbon (DLC) films were deposited on Si substrates by pulsed laser deposition (PLD) at varying N2 pressure. The films were characterized by Raman spectroscopy and X-ray diffraction (XRD). Spectra show that the sp2 hybridized carbon content increases with increasing N2 pressure and that the films have a mainly amorphous structure. The residual stress of the films is reduced ...
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Diamond-like carbon (DLC) films have been prepared by pulsed laser deposition (PLD) (wavelength 248 nm), ablating highly oriented pyrolytic graphite (HOPG) at room temperature in a vacuum of 10.2 Pa, at fluences between 0.5 and 35 Jcm. Films have been deposited on Si(100) with and without a SiC interlayer. Structural analysis, such as visible and UV Raman, Infrared and Electron Energy Loss (EEL...
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Diamond-like carbon (DLC) thin films used in this study were prepared with DC magnetron sputtering deposition. Silicon (100) wafers were used as the substrates onto which an RF bias was applied during the film deposition. For the nitrogen doped DLC films, a pure graphite target was used as the carbon source and nitrogen gas was introduced into the deposition chamber via a mass flow controller. ...
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ژورنال
عنوان ژورنال: Malaysian Journal of Fundamental and Applied Sciences
سال: 2014
ISSN: 2289-599X,2289-5981
DOI: 10.11113/mjfas.v8n2.129